Advancing Chemical Technologies
for Semiconductors, Clean Energy
& Life Sciences.
FAST CHEMTECH chemical blending and delivery systems, unlike anything else available on the market today, allow our customers to configure and design chemical systems according to their individual process and factory requirements. The systems are designed to accurately blend and deliver ultra-pure chemicals to the point of consumption from any type of source container and with full redundancy, and metrology if required. The modular configuration allows for standardisation in the control but the ability and reconfigure should their process or volume demand change through the product lifecycle. Modules can be located in any configuration to accommodate various space and facility constraints.
FAST CHEMTECH systems are designed for demanding bulk chemical blending and delivery applications where ultra-pure and safe processing will ensure the highest yield.
Our systems offer:
• A configurable range (for all purity grades, all consumptions and all budgets)
• A modular concept that can be adapted to our customer needs
• High reliability
• Integrated metrology options
• Easy maintenance (user-friendly software, settings, etc.)
• Over 20 years’ experience
CT | CONTROL
The CT | CONTROL Modules incorporate a centralized means to corral the electrical and control components for the CT Modular series helping optimize the entire process, enhance safety, increase uptime and ensure blend and delivery stability.
It uses standard off the shelf components and an industrial PLC and HMI control displaying the system PI&D status, with user friendly input and output screens, recipe selection, along with alarm logging etc. The system can collect Key Input Process Variables that allows engineers to have full visibility of their process.
CT | DELIVERY MODULES
The CT | Delivery Modules allow the automatic distribution of ultrapure chemical acids and bases, from totes and drums to the Points-of-Use (POU), or to the blending and day tank modules using controlled pumping. The design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes, and the various modular layouts with easy interchangeability allowing the end user to swap format easily without having to replace the complete system. A truly flexible system that can meet your changing production needs.
CT | BLEND MODULES
The various CT | Blend Modules provide a medium to large volume chemical blending capability suitable for standard applications such as TMAH (TetraMethylAmmonium Hydroxide), HF (Hydrogen Fluoride) or NH4OH (Ammonia Solution) dilution etc. The system uses weight-based methodology blending. The blend tank is mounted on a scale and the constituents are added sequentially as required. A low shear maglev pump is used to homogenize the mix, that can be validated by various metrology options.
Inline blending modular options can also offer a cost-effective option for low-medium volume post CMP chemistries etc.
CT | TANK MODULES
FAST CHEMTECH CT | TANK solutions offer multiple capacity and redundancy options that pair with the blending and delivery systems to provide continuous flow and pressure to the various processing systems within
the fab.
CT | VALVE MANIFOLD BOX
The CT VMB offers various standardised 4, 6, 8, 10 etc stick configurations installed in the supply loop of Delivery, Blend or Tanks Modules. The system features optimized layout and piping design to minimize equipment footprint and promote ease of installation, service and maintenance. The system is designed to have a large and clear PVC door for enhanced visibility and accessibility as well as a built-in leak sensor with remote communications to detect leaks inside the cabinet etc.
Chemical Blending & Delivery Brochure
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Discover more about our Blending, Collection and Delivery Solutions for Slurry and Solvents.
